HASO EUV

HHG, synchrotron, EUV-FEL, new generation lithography

The HASO EUV offers unsurpassed quality, precision and ease of use for ultra-short wavelength beam characterization, adjustment and alignment.

BEST FOR
– HHG, synchrotron and EUV-FEL beam alignment and characterization
– Mirror alignment in beamlines, Bender optimization
– Stability characterization
– Schwarzschild telescope alignment and characterization
– Zoneplace characterization
– Plasma science

SOFTWARE
WAVEVIEW metrology software with 150 functions included
+ Extensions for PSF, MTF and Strehl ratio
+ Optional SDK for interfacing
WAVETUNE Adaptive Optics software
+ Extensions for AO applications
+ Optional SDK for interfacing with any custom system
Windows10 compatible

Application note: Absolute measurement
Application note: Optimization of high harmonic beam line from the source to the focal spot