HASO DUV Wavefront sensor
Quality wavefront sensing in the 193-410 nm spectrum
HASO DUV Wavefront sensor
Quality wavefront sensing in the 193-410 nm spectrum
The HASO DUV is a Shack Hartmann wavefront sensor for increasingly demanding applications in the Ultraviolet spectral range.
It features the new SpotTracker technology, which provides absolute wavefront sensing and tilt information and makes sensor alignment a mere formality.
Check out the HASOs Table to see our full HASO and LIFT series: compare specs and choose what fits best your requirements!
HASO DUV Wavefront sensor
The HASO DUV Shack Hartmann wavefront sensor combines all the unique features developed by Imagine Optic during 30+ years of innovation and customers feedback: ease of use (absolute measurement thanks to the embedded factory calibration), high performance (high accuracy of lambda/100 RMS, very large dynamic range), robustness (phase measurement independent of beam intensity variation, achromaticity over calibrated spectral range, insensitivity to vibrations).
Applications+ Quantify optical system’s aberrations
+ Check if optical mount distorts optics + Verify compliance with specifications + Align system for optimal performance + Predict system’s focalization and imaging quality + Measure effects of temperature and gravity on performance + Pilot wavefront corrector to change aberrations + Diagnose laser beam, adjust and check pointing stability + Collimate optical systems and lasers + Quantify optical components and systems dependency to wavelength |
Best For+ Lithography, semiconductor manufacturing |
Software
Description |
Preliminary Specifications |
| Pupil size | 7.7 x 7.7 mm² |
| Number of sub-apertures dedicated to analysis | 86 x 86 |
| Calibration wavelength range | 193nm or 240-410nm |
| Max. acquisition frequency | 25 Hz |
| Interface | USB3 |
Will be available soon!
Will be available soon!