Semiconductors  

Optical metrology solutions designed for optical testing and qualification needs in lithography manufacturing

Optical metrology for semiconductors and lithography measuring surface figure and wavefront error in plane parallel optics lenses and mirrors

Imagine Optic’s Optical metrology for semiconductors and Lithography solutions offer precise optical testing and qualification tools, essential for quality assurance and performance optimization in microchip production and advanced photolithography systems. Using patented metrology systems such as the Parallel Optics Procedure (POP) and leading wavefront sensors, Imagine Optic enables manufacturers to measure and analyze surface shape, transmitted and reflected wavefront errors, and minute aberrations across plane-parallel optics, lenses, and mirrors used in semiconductor fabrication.

With the MESO metrology instrument and HASO Shack–Hartmann wavefront sensors, users can accurately perform optical testing in reflection and transmission, qualifying each component’s surface figure and overall wavefront error—critical metrics for maintaining high yield and minimizing defects in semiconductor and lithography applications. These real-time measurement systems distinguish subtle defects, track Zernike coefficients to pinpoint specific aberrations, and support both alignment and optimization workflows on production lines and in R&D environments.

Wavefront sensors for lithography steppers testing projection optics wavefront and pupil quality from EUV and DUV to visible wavelengths

Lithography steppers

Test the wavefront and pupil quality of projection optics and align complex multi-element optical systems, optics and sources with our Hartmann and Shack-Hartmann wavefront sensors from the EUV and DUV spectral range to the VIS range.

Optical metrology for wafer inspection measuring wafer surface figure and bow in vibration environments where interferometry is limited

Wafer inspection

Discover optical metrology instruments developed to test of flat samples and characterize the surface figure and bow of wafers even when vibrations, working distance or wavelength requirements are not compatible with interferometric methods.

UV laser testing with M2 measurement and wavefront sensing for beam quality collimation pointing alignment and aberration control

UV Laser Testing

For beam testing, collimation, beam pointing adjustment, alignment and aberration control of lasers and complete optical paths up to delivery, choose a compact, easy and quick to set up M2 or wavefront sensing solution combining live phase and intensity measurements.

SEMICONDUCTORS Applications

 

+ Characterization of projection optics in steppers
+ Injection beam alignment at the stepper’s projection objective input

 

+ X-ray source generation for semiconductor inspection
+ Laser beam characterization on tin balls for process monitoring

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