Metrology tool for characterizing optical components
HASO R-Flex is a compact, robust metrology tool for characterizing optical components and systems. It is consisting of
- Shack-Hartmann wavefront sensor (HASO) andmetrology software (WaveView)
- Light source (SMLS)
- Focusing module (MODxx – F/#)
The principle of HASO R-Flex is based on wavefront sensing and auto-collimation.
Examples of optics that can be characterized by HASO R-Flex are lenses, concave mirrors, telescopes, etc.