The HHG, synchrotron, EUV-FEL and new generation lithography solution

Imagine Optic’s HASO EUV wavefront sensors offers professionals unsurpassed quality, precision and ease of use. Key features include:

  • Working wavelength range between 4 and 40 nm
  • highest-resolution – 5184 independent measurement points
  • Large aperture dimension of 13 x 13 mm²
  • Ultra short wavelength beam characterization, adjustment and alignment
  • EUV lithography
  • Synchrotron and EUV-FEL beam alignment and characterization
  • Micro and nano-beam focusing, automatic beam alignment, and achieving high Strehl ratio for adaptive optics applications
  • Perfectly adapted for laboratory applications
  • Independent phase and intensity measurement

Imagine Optic’s HASO EUV wavefront sensor, developed in collaboration with the LOA and the SOLEIL synchrotron, is the only device of its kind available that offers you the extreme precision and direct measurement functionality needed for today’s demanding laboratory and industrial applications.

Designed and built in collaboration with our customers and with their needs as the top priority, the HASO EUV incorporates our patented rotated square technology to offer high spatial resolution and wide dynamic range, making it the ideal choice for EUV lithography, synchrotron and EUV-FEL beam analysis. When used for adaptive optics, the EUV becomes a powerful tool for that provides you with micro and nano-beam focusing, a high Strehl ratio and precise control of the focal spot shape.
When combined with our powerful and easy-to-use software packages, you can easily conduct wavefront acquisition and reconstruction. Additional add-on modules offer features including extended wavefront reconstruction, Point Spread Function (PSF) and Modulation Transfer Function (MTF) measurements, as well as a dynamic library that enables you to build your own software applications using this remarkable device.

Specifications

HASO EUV

Description Specification
Aperture dimension 13 x 13 mm²
Number of Subapertures 72 x 72
Curvature dynamic range 0.5 m to ∞ (diverging)
Repeatability (rms) ~ λ/200
Wavefront measurement accuracy in relative mode (rms)1 ~ λ/100
Wavefront measurement accuracy in absolute mode (rms)² ~ λ/75
Tilt measurement sensitivity (rms) 0.05 µrad
Focus measurement sensitivity (rms) < 1.10-5 m-1
Spatial beam sampling step ~ 180 µm
Minimum readout time ~600 ms (@2 MHz digitization)
Working photon energy (wavelength)3 30 eV – 300 eV (4 nm – 40 nm)
Calibrated wavelength user specific
Length 270 mm
Compliant vacuum (hydrocarbon free, compatible with clean vacuum) 10-7 mbar
Interface / Power supply USB / included
Operating system Win 7 (x86 / x64)
HASOv3 metrology software included
External trigger yes
(1) Wavefront as seen by the device.

(2) Difference between the real wavefront and a reference wavefront obtained in similar conditions (5λ of shift max).

(3) Calibration ensured inside this range. Sensor may be used outside of this range.

Content of product delivery:

  • Acquisition card
  • Connection cable
  • HASO WFS documentation 
  • Calibration certificate
  • Metrology Software HASO v3

Downloads

Service Documents

HASO EUV

HASO EUV | Specification sheet

Publication list | X-EUV