Off-line mirror characterization: SHARPeR an eurostars project

The new ultra-high precision Shack-Hartmann wavefront sensor is integrated in an optical head coupled with a dedicated motion platform to provide 2D slope/height maps. It is called SHARPeR and it is an eurostars project. The surface under test can be oriented horizontally or vertically to match the actually used configuration. Customers can specify both longitudinal (scanning direction) and transversal travelling ranges to expand the range of characterization area. Optionally, rotation and tip-tilt axes can be added to the motion system. This enables the user to automatically flip the optical component under test without disturbing the measurement environment by manual interference.

This complete metrology platform is designed for manufacturers without beamline access to deliver optical surfaces of extreme precision as required for, e.g., focusing or transferring x-rays in synchrotron applications. The SHARPeR platform sits in a special chamber to ensure the best possible environment for ultimate measurement results.

SHARPeR an eurostars project

Thanks to Eurostars funding, two world leading companies are now working together to combine their expertise and deliver the complete turnkey system. Imagine Optic (France) develops the ultra-high precision Shack-Hartmann wavefront sensor (HASO UHP) with exceptional wavefront measurement accuracy up to λ/1000 rms. Q-sys (Netherlands) develops the highly stable motion platform with excellent repeatability, ideal for optical metrology.

Complete turnkey system: SHARPeR

  • Up to 1.5 m long mirrors
  • 50 nrad rms accuracy / 1.2 mm resolution
  • HFM and VFM configuration
  • Mirror down to 1.7 m of radius of curvature
  • 2D slope/height maps
  • Measurement speed: 70 mm/min
  • Rotation and Tip/Tilt option
  • Full metrology software suite

This project is funded by EUROSTARS Program.

Example of results :

X and Y 2D slopes map result of the Stitching Shack-Hartmann optical head (SSHOH)

Contact the project consortium

Imagine Optic (Consortium management)

Telephone : +33 (0)1 64 86 15 60
Fax: +33 (0)1 64 86 15 61
Q-Sys B.V

Telephone : +31 (0)492 714434
Fax: +31 (0)492 714435