Optical metrology of grazing incidence optics & optical
Nowadays, grazing incidence X-ray optics are reaching outstanding optical qualities (error slope ~ nrad RMS) in order to answer the synchrotron and free-electrons needs. Manufacturing such excellent optics requires outstanding metrology tools. Imagine Optic and Q-Sys B.V under the European Project SHARPeR developed a new 2D visible light profilometer with unprecedented accuracy. The system commercially available since 2015 is adapted to mirrors up to 1.5 m long and with radii of curvature as small as 1.5 m.
SHARPeR is a high accuracy automated metrology platform for extremely high quality optical components needed for example in synchrotron beamlines, EUV lithography systems and telescopes. Meter-scale X-ray mirrors will be characterized with a slope error accuracy better than sub-µrad rms.
“A 2 D high accuracy slope measuring system based on a stitching Shack Hartmann optical head” M. Idir, K. Kaznatcheev, G. Dovillaire, J. Legrand,and R. Rungsawang, Optics Express 22, 2770 (2014)
“Ex- and in-situ metrology based on the Shack-Hartmann technique for sub-nanometric metrology” M. Idir , G. Dovillaire and P. Mercere, Synchrotron Radiation News 26, 23 (2013)
“A 2D optical slope measuring tool for x-ray mirrors ” M. Idir and G. Dovillaire, SPIE Newsroom (2013)
“Hartmann and Shack–Hartmann wavefront sensors for sub-nanometric metrology” P. Mercère, M, Idir, J. Floriot and X. Levecq, Modern Developments in X-Ray and Neutron Optics pp 219-232 (2008)