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HASO™ X-EUV (X-ray - Extreme UltraViolet) Shack-Hartmann wavefront sensors
 
  Imagine Optic's HASO X-EUV wavefront sensor, developed in partnership with LOA and the SOLEIL synchrotron, is the only device of its kind available that offers you the extreme precision and direct measurement functionality needed for today's demanding laboratory and industrial applications.
  • Synchrotron and X-fel beam alignment and characterization
  • Micro and nano-beam focusing, automatic beam alignment, and high Strehl ratio for adaptive optics
  • Perfectly adapted for laboratory applications
  • Independent phase and intensity measurement
  • Insensitive to vibration

HASO-XEUVDesigned and built in collaboration with our customers and with their needs as the top priority, the HASO X-EUV incorporates our patented rotated square technology to offer high spatial resolution and wide dynamic range, making it the ideal choice for EUV lithography, synchrotron and X-fel beam analysis.  When used for adaptive optics, the X-EUV becomes a powerful tool for that provides you with micro and nano-beam focusing, a high Strehl ratio and precise control of the focal spot shape.

When combined with our powerful and easy-to-use software packages, you can easily conduct wavefront acquisition and reconstruction.  Additional add-on modules offer features including extended wavefront reconstruction, PSF and MTF measurement, as well as a dynamic library that enables you to build your own software applications using this remarkable device.

Applications include ultra short wavelength beam characterization, adjustment and alignment; adaptive optics and automatic beam alignment; and EUV lithography.

Technical specifications are detailed in the table below. If you would like more information on our HASO wavefront sensors, please call +33 (0)1 64 86 15 60 or e-mail us by clicking here.

  λEUV λX X
Aperture dimension 19.7 x 19.7 mm² 10.1 x 10.1 mm² 0.7 x 1.0 mm²
Number of sub-apertures dedicated for analysis 51 x 51 75 x 75 36 x 48
Curvature dynamic range ± 0.5 m to ± ∞ 0.4 to 4 m – divergent beam ±40 mm to ±∞
Repeatability (rms) ~ λ/100 ~ λ/10 0.03 nm
Wavefront measurement accuracy in
absolute mode (rms)
~ λ/50 ~ λ/4 0.05 nm
Wavefront measurement accuracy in
relative mode (rms)
~ λ/75 ~ λ/5 0.1 µrad
Tilt measurement sensitivity (rms) 0.05 µrad 0.05 µrad 0.1 µrad
Focus measurement sensitivity (rms) < 1.10-4 m-1 < 2.10-4 m-1
Spatial beam sampling step ~ 390 µm ~ 130 µm 20 µm
Minimum readout time ~2 sec
(@1 MHz digitization)
~0.6 sec
(@2 MHz digitization)
17 ms
Working photon energy (wavelength) 1 50 eV - 200 eV (7 nm - 25 nm) 1 keV – 4 keV (1 nm – 0.3 nm) 8 KeV - 15 KeV
Storage temperature / Operating environment < 55° C / 5° C – 30° C
Compliant vacuum (hydrocarbon free, compatible with clean vacuum) 10-6 mbar not vacuum compliant
Power supply Via controller (100-110-220 or 240 V AC) Via Firewire (12 V)
Interface PCI board Firewire
(1) HASO X-EUV wavefront sensors can be optimized for other wavelength ranges. Contact Imagine Optic for more details.
 

Companion software
 

HASOv3, delivered with all HASO sensors and available as an SDK, lets you get the most out of your wavefront sensor with wide-ranging functionalities. Click here to learn more.

Stitchwave is a unique software that complements HASOv3's move & measure option to enable you to characterize large surfaces. Click here to learn more.

 

Key HASO family features
 

Phase & intensity simultaneously and independently – Our patented sensor design enables you to measure both phase and intensity simultaneously and independently, in real time.

Absolute measurement Our proprietary calibration technology and meticulous quality controls protocols eliminate the need for a reference beam and allow you to perform true absolute measurement.

Dynamic Spot Tracking™, Auto Spot Finder™ & Rotated Square™ technology combined with the quality of our refractive microlens arrays provide superior accuracy and eliminate crossing spots, without comprising dynamic range.

 

Documentation
 

PDFProduct brochure - click the PDF icon to download.

 

Complementary products
 

PDFBendAO - Bender and adaptive optics in one instrument. Click here to learn more.

 
 

PDFCASAO - Adaptive optics command and control software. Click here to learn more.

 

Application notes
 

PDFTrue absolute measurement - This document talks about absolute measurement, what it is and how you can test your current wavefront sensor to see if it is capable. Click here to read the note.

 
 
 
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