 Our HASO UV Hartmann wavefront sensor is the ideal tool for customers working in the ultraviolet spectrum (190 - 300 nm). They provide fast, accurate and reliable measurements by taking advantage of the HASO family's standard functionalities that customers have come to rely on, including absolute measurement, unequalled accuracy and insensitivity to vibration at speeds up to 20 Hz.
HASO UV is the ideal tool for UV optical component metrology (mirrors, lenses, flat windows, etc.) and are equally perfect for aligning and characterizing optical systems used in microlithography, measuring thermal and gravitational effects, and mechanical deformities. HASO UV is delivered with HASOv3, our industry leading wavefront analysis software. With just a few clicks, you can perform both zonal and modal wavefront reconstruction as well as visualize the spot image and raw camera data. Optional add-ons enable you to go even further and calculate the PSF, MTF, Strehl ratio and obtain the M² parameter.
Technical specifications are detailed in the table below. If you would like more information on our HASO UV wavefront sensors, please call +33 (0)1 64 86 15 60 or e-mail us by clicking here.
| 7.8 x 7.8 mm² |
| 50 x 50 |
| till ± 1.5° |
| ± 0.030 m to ± ∞ |
| 0.1 (max) |
| ∼ 1.5 nm |
| ∼ 3.5 nm |
| ∼ 2.5 nm |
| 0.5 μrad |
| 2.5.10-4m-1 |
| ~ 160 μm |
| ~ 20 Hz / ~ 3 Hz |
| 193 – 300 nm |
| 15 – 30° C / 5 – 45° C |
| CamLink |
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