The ideal solution for the ultra-precise characterization of large surfaces
- 2D surface characterization
- Superior accuracy by stitching methods
- Sub-microradian performance (accuracy, sensitivity, repeatability)
- Simple, compact and robust design
- Wide curvature dynamic range
- Sub-millimeter spatial resolution
 Imagine Optic’s Shack-Hartmann Long-Trace Profiler (SH-LTP), developed in conjunction with the SOLEIL synchrotron, is the ideal solution for performing highly accurate, bidimensional, sub-microradian characterization of large optical component surfaces and planeness of semiconductor wafers. Even more, its wide curvature dynamic range enables it to characterize highly-curved objects (spherical, elliptical, toroidal).
The SH-LTP is comprised of an illumination system functioning at 405 nm and a high-accuracy Shack-Hartmann wavefront sensor that incorporates our patented rotated-square technology in the microlens array to increase spatial resolution to the sub-millimeter level. Compact, robust and easy to integrate into existing setups, this flexibly designed system can also be delivered with its own translation stage.
Our proprietary software package, StitchWave™, enables the SH-LTP to accurately measure the surface of large optics at the sub-microradian level, while minimizing translation effects.
Technical specifications and software advantages are detailed below. The specifications presented are for a typical setup, they are subject to change following individual client needs and applications. If you would like more information, please call +33 (0)1 64 86 15 60 or e-mail us by clicking here.
| 11.7 x 11.7 mm² (LxW mm² before stitching) |
| 26 x 26 (NxM before stitching) |
| ± 1 ° (120 λ) |
| ± 0.7 m to ± ∞ |
| <0.1µrad |
| 0.1 µrad |
| 0.05 µrad |
| 5.10-5 m-1 |
| 450 µm |
| 7.5 Hz |
| Adjustable (>80% required for sub-microradian performances) |
| 405 nm |
| 20 - 25 °C |
| 350x287.5x150.25 mm / 5 kg |
 HASO™v3 for the SH-LTP (full software description)
- All the functionalities of HASOv3 are available for the alignment of the SH-LTP with the surface to be measured.
- Move and Measure option: this HASOv3 option manages the translation stages and performs the acquisition of the surface local slopes at different locations.
- The dimensions of the tested surface and the stage steps (coupling ratio for stitching) are chosen by the user.
 Stitchwave for the SH-LTP (full software description)
- The reconstruction of the local slopes (X and Y slopes) is performed by stitching together the acquisitions from the different locations.
- Surface reconstruction is obtained by numeric integration following either zonal or modal methods. In modal reconstruction, modal coefficients can be visualized.
- Reconstructed slopes and surfaces are displayed (2D mappings with PV and RMS value indicators).
- Parameters including tilt and radii of curvature in orthogonal directions are calculated via the globally reconstructed data.
- The first 5 aberrations (tilt, focus, astigmatism) can be filtered out so that slope and profile errors can be visualized.
- Additional functionalities allow the extraction of sub-regions of interest and spatially-averaged monodimensional traces.
- Several software utilities are available (stage control, averaging of several acquisition files).
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