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Our
HASO UV Hartmann wavefront sensor is the ideal
tool for customers working in the ultraviolet
spectrum (190 - 300 nm). They provide fast,
accurate and reliable measurements by taking advantage
of the HASO family's standard functionalities
that customers have come to rely on, including
absolute measurement, unequalled accuracy and
insensitivity to vibration at speeds up to 20
Hz.
Our proprietary Dynamic Spot
Tracking™ and Auto Spot Finder™ features
provide superior accuracy and eliminate crossing
spots, without compromising dynamic range.
Even more, Imagine Optic's proprietary calibration
technology enables you to obtain absolute measurements
every time, without the need for a reference beam,
and our patented sensor design allows you to measure
phase and intensity independently and in real-time.
HASO UV is the ideal tool
for UV optical component metrology (mirrors, lenses,
flat windows, etc.) and, when couple with our
HASO
v3 software, enables you to perform both zonal
and modal wavefront reconstruction, calculate
the PSF, MTF and Strehl ratio, visualize the spot
diagram and obtain the M² parameter.
These sensors are equally perfect for aligning
and characterizing optical systems used in microlithography,
measuring thermal and gravitational effects, and
mechanical deformities.
If you would like more information on our products, please call +33 (0)1 64 86 15 60 or e-mail us at  |
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| Aperture dimension |
8x 8 mm2 |
| Sub-apertures dedicated for analysis |
50 x 50 |
| Tilt dynamic range |
till ± 1,5° |
| Focus dynamic range (1) |
± 0,030 m to ± ∞ |
| Maximum operating aperture (half angle sinα) |
0,13 (max) |
| Repeatability (rms) |
∼ 1,5 nm |
| Wavefront measurement accuracy in absolute mode (rms) (2) |
∼ 3,5 nm |
| Wavefront measurement accuracy in relative mode (rms) (3) |
∼ 2,5 nm |
| Tilt measurement accuracy (rms) |
0,5 μrad |
| Focus measurement accuracy (rms) |
2,5.10-4 m-1 |
| Spatial resolution |
~ 160 μm |
| Acquisition frequency / processing frequency |
~20 Hz / ~ 3 Hz |
| Working wavelength range |
193 – 300nm |
| Working temperature |
15 – 30° C/ 5 – 45° C |
(1) For the central wavelength: 470 λ for the HASO UV 50.
(2) Wavefront directly measurement by the wavefront sensor (no added lens).
(3) Difference between a referenced wavefront and the measured wavefront, in a range < 10 λ. |
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